环境振动对光栅拼接装置稳定性影响分析

In this paper the stability of tiled-grating was studied, which was affected by the ambient vibration, temperature transient, contingency factors, etc. Ambient vibration is the main factor which influences the stability of tiled-grating. There are various excitations exist in target range, in order to identify main factor of the tiled-grating stability from ambient vibration, the ambient vibration measured in target area by using multi-channel micro vibration measurement equipment. The PSD of ambient vibration is gotten and separated by analysing vibration signal, which is considered as excitation and then the response was achieved by analyzing random vibration. The result indicated that the tip and tilt of tiled-grating are 0.7758 urad and 0.2506 urad respectively under the HVAC worked, which meets the stability requirements of tiled-grating.