基于MEMS振镜的光纤光栅高速解调系统

he demodulation frequency of the demodulation system based on F-P filter is slow, and the demodulation error will be generated when the physical quantity with high change frequency is measured. Therefore, it is necessary to improve the demodulation frequency on the premise of ensuring the demodulation accuracy. To solve this problem, a demodulation system based on MEMS vibroscope is proposed, including the construction of a demodulation system based on MEMS vibroscope. The optical etalon is used to solve the problem that the driving voltage and output wavelength of the MEMS vibroscope have nonlinear errors that affect the demodulation accuracy, and the stress wavelength value of the sensor is demodulated by the principle of center wavelength positioning and the peak search algorithm. Finally, the static performance of the demodulation system is tested with an equal strength cantilever beam. The flexible plate is driven by a motor to run sinusoidal curves with frequency of 1Hz and 5Hz respectively, and the demodulation system is used to collect data. Experiments show that the linearity of the demodulation system is 0.85%, and the coefficient of determination is 0.9847 when fitting the wavelength curve.