误差分离法在广域薄膜形貌测量中的应用

In order to separate measurement error caused by the work table moving, the least squares simultaneous equation method is applied to achieve self-correction of the measurement process. The measurement results using different number of probes are analyzed. First，the modeling principle and resolution process of the least squares simultaneous equation method under the joint action of multiple probes are introduced and the corresponding theory uncertainty calculation method is given. The film wide area measurement method and the feasibility of the application of the least squares simultaneous equation method are also introduced and analyzed. Then, the experimental data is separated from the measurement error. When contrasting with the actual value, the bias and uncertainty in the case of different number of probes are analyzed. Experimental results show that: the work table moving error and the shape can be separated by least squares method. In the given standard deviations of the autocollimator and white light interferometer, the experimental standard deviation calculated in the case of using different number of probes is near to the corresponding theory uncertainty. The high-precision measurements of a large area can be achieved when the method is used in the multi-point probe system platform.