互连层空洞对功率芯片粘接可靠性的影响
随着大尺寸CMOS图像传感器芯片在消费电子、工业检测、医疗成像和航空航天等领域的广泛应用,其可靠性直接影响到整个封装系统的性能与寿命。然而互连层中容易形成空洞,引发芯片性能下降甚至失效的风险,为分析空洞影响,本文以大尺寸CMOS图像传感器芯片封装中的互连层空洞对可靠性的影响为研究对象,结合理论分析与仿真方法,系统探讨互连层空洞分布和大小对封装可靠性的作用机制。通过建立热-机械多物理场模型,深入研究互连层关键参数对热传导性能与应力分布的影响,为大尺寸CMOS图像传感器芯片的封装设计提供了理论依据。
With the widespread application of large-scale CMOS image sensor chips in consumer electronics, industrial inspection, medical imaging, and aerospace fields, their reliability directly impacts the performance and lifespan of the entire packaging system. However, voids are prone to form in the interconnect layer, posing risks of performance degradation or even failure of the chips. To analyze the impact of voids, this paper focuses on the influence of interconnect layer voids on the reliability of large-scale CMOS image sensor chip packaging. Combining theoretical analysis and simulation methods, the study systematically investigates the mechanisms by which the distribution and size of interconnect layer voids affect packaging reliability. By establishing a thermo-mechanical multi-physics model, the research delves into the influence of key parameters in the interconnect layer on thermal conductivity and stress distribution, providing a theoretical foundation for the packaging design of large-scale CMOS image sensor chips.
张恒文、章奇宇
北京邮电大学智能工程与自动化学院,北京 100876北京邮电大学智能工程与自动化学院,北京 100876
半导体技术微电子学、集成电路
芯片封装粘接层空洞温度循环有限元分析
hip PackagingBonding Layer VoidsThermal CyclingFinite Element Analysis
张恒文,章奇宇.互连层空洞对功率芯片粘接可靠性的影响[EB/OL].(2025-04-11)[2025-04-21].http://www.paper.edu.cn/releasepaper/content/202504-109.点此复制
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