首页|3D in-situ profiling in a laser micromachining station using dual-comb LiDAR

3D in-situ profiling in a laser micromachining station using dual-comb LiDAR

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英文摘要

We demonstrate the integration of coaxial dual-comb LiDAR into a laser micromachining station, enabling 3D profiling with sub-micron axial precision without moving the machined piece. This setup facilitates in-situ nondestructive testing (NDT) and evaluation, reducing the effort and time required for micromachining process development and control.

作者：Hayk Soghomonyan、Justinas Pupeikis、Benjamin Willenberg、Armin Stumpp、Lukas Lang、Christopher R. Phillips、Bojan Resan、Ursula Keller

作者单位：

学科分类：光电子技术

推荐引用：Hayk Soghomonyan,Justinas Pupeikis,Benjamin Willenberg,Armin Stumpp,Lukas Lang,Christopher R. Phillips,Bojan Resan,Ursula Keller.3D in-situ profiling in a laser micromachining station using dual-comb LiDAR[EB/OL].(2025-04-13)[2025-04-28].https://arxiv.org/abs/2504.09659.点此复制

3D in-situ profiling in a laser micromachining station using dual-comb LiDAR

3D in-situ profiling in a laser micromachining station using dual-comb LiDAR

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