he influence of position errors on stray light in compensation interferometry
Null compensation interferometry is the primary testing method for the manufacture of ultra-high-precision aspheric mirrors. The crosstalk fringes generated by stray light in interferometry can affect accuracy and potentially prevent the testing from proceeding normally. Position errors include the decenter error, tilt error, and distance error. During the testing process, position errors will impact the testing accuracy and the crosstalk fringes generated by stray light. To determine the specific impact of position errors, we use the concept of Hindle shell testing of a convex aspheric mirror, and propose the simulation method of crosstalk fringes in null compensation interferometry. We also propose evaluation indices of crosstalk fringes in interferometry and simulate the influence of position errors on the crosstalk fringes. This work aims to help improve the design of compensation interferometry schemes, enhance the feasibility of the design, reduce engineering risks, and improve efficiency.
onglin Xue、Xuejun Zhang、Xin Zhang、Qiang Cheng、Longxiang Li、Yutong Sun
State Key Laboratory of Applied Optics, Changchun 130033, China ;University of Chinese Academy of Sciences, Beijing 100049, China ;Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China ;Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun 130033, ChinaUniversity of Chinese Academy of Sciences, Beijing 100049, China ;Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China State Key Laboratory of Applied Optics, Changchun 130033, China ;University of Chinese Academy of Sciences, Beijing 100049, China ;Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China ;Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun 130033, ChinaState Key Laboratory of Applied Optics, Changchun 130033, China ;University of Chinese Academy of Sciences, Beijing 100049, China ;Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China ;Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun 130033, ChinaState Key Laboratory of Applied Optics, Changchun 130033, China ;University of Chinese Academy of Sciences, Beijing 100049, China ;Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China ;Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun 130033, ChinaState Key Laboratory of Applied Optics, Changchun 130033, China ;University of Chinese Academy of Sciences, Beijing 100049, China ;Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China ;Key Laboratory of Optical System Advanced Manufacturing Technology, Changchun 130033, China
工程基础科学
ompensation interferometryStray lightMulti-beam interferencePosition error
onglin Xue,Xuejun Zhang,Xin Zhang,Qiang Cheng,Longxiang Li,Yutong Sun.he influence of position errors on stray light in compensation interferometry[EB/OL].(2025-04-24)[2025-05-16].https://chinaxiv.org/abs/202504.00275.点此复制
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