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Lithium niobate acoustic resonators operating beyond 900 $^\circ$C

Lithium niobate acoustic resonators operating beyond 900 $^\circ$C

来源:Arxiv_logoArxiv
英文摘要

In this paper, fundamental shear-horizontal SH0 mode Leaky Surface Acoustic Wave (LSAW) resonators on X-cut lithium niobate leveraging dense and robust electrodes such as gold and tungsten are demonstrated for extreme temperature operation in harsh environments. A novel post-processing approach based on in-band spurious mode tracking is introduced to enable reliable characterization under extreme parasitic loading during testing. Devices exhibit stable performance throughout multiple thermal cycles up to 1000 $^\circ$C, with an extrapolated electromechanical coupling coefficient kt2 = 25% and loaded quality factor Qp = 12 at 1000 $^\circ$C for tungsten devices, and kt2 = 17%, Qp = 100 at 900 $^\circ$C for gold devices.

Luca Colombo、Matteo Rinaldi、Walter Gubinelli、Hasan Karaca、Ryan Tetro、Sariha N. Azad、Philip X. -L. Feng

电工材料物理学

Luca Colombo,Matteo Rinaldi,Walter Gubinelli,Hasan Karaca,Ryan Tetro,Sariha N. Azad,Philip X. -L. Feng.Lithium niobate acoustic resonators operating beyond 900 $^\circ$C[EB/OL].(2025-04-11)[2025-07-01].https://arxiv.org/abs/2504.17793.点此复制

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