三坐标测量机非接触式测量在高能光源中的应用

he high energy synchrotron radiation light source is one of the fourth generation synchrotron radiation light sources with the highest design brightness in the world, the storage ring circumference is long, the number of magnets is large, and the alignment measurement work requires higher accuracy. [Purpose]: In order to meet the complex requirements of the alignment measurement of high energy synchrotron radiation light source, such as the measurement of the position of the silk line, the monitoring of the edge of the thin slice and the accuracy verification of the visual scanning equipment, a composite coordinate measurement system based on the cooperative work of contact and non-contact probe is proposed. [Methods]: By integrating the image probe and the contact probe, the complementary advantages of both in accuracy, efficiency and adaptability are fully utilized, and the limitations of the traditional single probe method in the field of deformable parts, highly reflective surfaces and complex geometric features are successfully solved. [Results]: The experimental results show that the comprehensive measurement uncertainty of the composite system is as low as 6.09m in the applications of rotating line magnetic center extraction, calibration of the blade zeroing of the adjustable diaphragm and accuracy verification of the tensioning scanner, among which the adjustment time of the blade zeroing of the beamline station is shortened to 0.25 hours and the accuracy is up to 10m. More than 4 times more efficient than traditional methods. [Conclusions]: The composite measuring system realizes high-precision collaborative measurement, significantly improves the efficiency and reliability of collimation work, meets the needs of high energy light source collimation measurement, shows the important development trend of CMM technology in the field of light source collimation, and provides a technical reference for multi-probe collaborative measurement in other precision engineering fields.