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Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond

Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond

来源:Arxiv_logoArxiv
英文摘要

We introduce Model Feedback Learning (MFL), a novel test-time optimization framework for optimizing inputs to pre-trained AI models or deployed hardware systems without requiring any retraining of the models or modifications to the hardware. In contrast to existing methods that rely on adjusting model parameters, MFL leverages a lightweight reverse model to iteratively search for optimal inputs, enabling efficient adaptation to new objectives under deployment constraints. This framework is particularly advantageous in real-world settings, such as semiconductor manufacturing recipe generation, where modifying deployed systems is often infeasible or cost-prohibitive. We validate MFL on semiconductor plasma etching tasks, where it achieves target recipe generation in just five iterations, significantly outperforming both Bayesian optimization and human experts. Beyond semiconductor applications, MFL also demonstrates strong performance in chemical processes (e.g., chemical vapor deposition) and electronic systems (e.g., wire bonding), highlighting its broad applicability. Additionally, MFL incorporates stability-aware optimization, enhancing robustness to process variations and surpassing conventional supervised learning and random search methods in high-dimensional control settings. By enabling few-shot adaptation, MFL provides a scalable and efficient paradigm for deploying intelligent control in real-world environments.

Shangding Gu、Donghao Ying、Ming Jin、Yu Joe Lu、Jun Wang、Javad Lavaei、Costas Spanos

自动化技术、自动化技术设备化学工业概论电化学工业

Shangding Gu,Donghao Ying,Ming Jin,Yu Joe Lu,Jun Wang,Javad Lavaei,Costas Spanos.Few-Shot Test-Time Optimization Without Retraining for Semiconductor Recipe Generation and Beyond[EB/OL].(2025-05-21)[2025-06-28].https://arxiv.org/abs/2505.16060.点此复制

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