一种基于逆向排程的晶圆制造风险评估方法
本文提出一种基于逆向排程的晶圆制造风险评估方法,主要根据工厂年度订单出货计划生成预作业批次,对工厂各产品动态生产周期进行标准化,利用逆向排程思想,倒推工件完成各道工序工艺的可能最晚时间,并形成初期的预作业需求清单,然后统计分析瓶颈机组是否存在过货能力风险,在满足订单当月出货的前提条件下,重新组合预排结果,直至瓶颈机组无过货能力风险或相关订单交期延至月末后终止影响。该方法不仅有效评估晶圆制造风险,而且也为生产提供有利的管理决策依据。
his paper proposes a risk assessment method for wafer manufacturing based on reverse scheduling. It mainly generates pre-job batches according to the factory\'s annual order shipment plan, standardizes the dynamic production cycle of each product in the factory, and uses the idea of reverse scheduling to calculate the possible latest time for each process of the workpiece to be completed, and form an initial pre-job demand list. Then, it statistically analyzes whether there is an overloading risk for the bottleneck equipment. Under the premise of meeting the shipment of orders in the current month, the pre-scheduling results are recombined until there is no overloading risk for the bottleneck equipment or the relevant order delivery date is postponed to the end of the month. This method not only effectively assesses the risks in wafer manufacturing, but also provides a favorable management decision-making basis for production.
陈广
上海华力集成电路制造有限公司
自动化技术、自动化技术设备
逆向排程晶圆制造风险评估
reverse schedulingwafer manufacturingrisk assessment
陈广.一种基于逆向排程的晶圆制造风险评估方法[EB/OL].(2025-07-21)[2025-08-18].http://www.paper.edu.cn/releasepaper/content/202507-22.点此复制
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