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首页|On the nature and charge state of the X-Defect, a radiation-induced Silicon defect with field-enhanced charge carrier emission

On the nature and charge state of the X-Defect, a radiation-induced Silicon defect with field-enhanced charge carrier emission

On the nature and charge state of the X-Defect, a radiation-induced Silicon defect with field-enhanced charge carrier emission

来源:Arxiv_logoArxiv
英文摘要

The elusive X-Defect, a defect found in low-resistivity $p$-type Silicon after irradiation, observed as a low-temperature shoulder of the $\mathrm{B}_\mathrm{i}\mathrm{O}_\mathrm{i}$ defect (Boron-interstitial-Oxygen-interstitial complex) in Thermally Stimulated Current (TSC) measurements, was investigated to determine its properties, matching them with those of a previously identified defect. Through a combination of TSC, Deep-Level Transient Spectroscopy (DLTS), Difference-DLTS (DDLTS), numerical simulations of field-enhanced charge carrier emissions in TSC measurements and a comparison to literature, the X-Defect was identified as the singly positively charged Silicon di-vacancy $\mathrm{V}_2(+/0)$. This assignment is supported by an agreement in activation energy, capture cross-section, trap type and charge emission process, as well as simulations comparing the effects of phonon-assisted tunnelling (PAT) and Poole-Frenkel (PF) mechanisms on TSC spectra. DDTLS measurements revealed a quadratic dependence of the activation energy on the electric field strength, confirming PAT as the prevailing mechanism over PF in the case of the radiation-induced X-Defect. Assigning the X-Defect to an electrically neutral defect in the space charge region resolves previous contradictions regarding its deficiency in impacting on the effective doping concentration.

Niels Sorgenfrei、Yana Gurimskaya、Anja Himmerlich、Michael Moll、Ulrich Parzefall、Ioana Pintilie、Joern Schwandt

半导体技术物理学

Niels Sorgenfrei,Yana Gurimskaya,Anja Himmerlich,Michael Moll,Ulrich Parzefall,Ioana Pintilie,Joern Schwandt.On the nature and charge state of the X-Defect, a radiation-induced Silicon defect with field-enhanced charge carrier emission[EB/OL].(2025-08-22)[2025-09-02].https://arxiv.org/abs/2508.16197.点此复制

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