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首页|Lattice design of a storage-ring-based light source for generating high-power fully coherent EUV radiation

Lattice design of a storage-ring-based light source for generating high-power fully coherent EUV radiation

Lu, Dr. Yujie Liu, Mr. Ao Li, Dr. Changliang WANG, Mr. Kun Zhang, Mr. Qinglei Wan, Dr. Weishi Fan, Dr. Weijie Liu, Mr. Junhao Li, Dr. Ruichun Wang, Mr. Yanxu Wu, Dr. Konglong Li, Prof. Ji Feng, Dr. Chao

Lattice design of a storage-ring-based light source for generating high-power fully coherent EUV radiation

Lattice design of a storage-ring-based light source for generating high-power fully coherent EUV radiation

Lu, Dr. Yujie Liu, Mr. Ao Li, Dr. Changliang WANG, Mr. Kun 1Zhang, Mr. Qinglei 2Wan, Dr. Weishi Fan, Dr. Weijie Liu, Mr. Junhao Li, Dr. Ruichun Wang, Mr. Yanxu Wu, Dr. Konglong Li, Prof. Ji Feng, Dr. Chao2

作者信息

  • 1. Shanghai Advanced Research Institute
  • 2. Chinese Academy of Sciences
  • 折叠

摘要

We present the physical design and systematic optimization of a high-performance storage ring tailored for the generation of high-power coherent radiation, with particular emphasis on the extreme ultraviolet (EUV) regime. The proposed ring adopts a Double Bend Achromat (DBA) lattice configuration and integrates 12 superconducting wigglers to significantly enhance radiation damping and minimize the natural emittance. And a bypass line is adopted to generate high power coherent radiation. Comprehensive linear and nonlinear beam dynamics analyses have been conducted to ensure beam stability and robustness across the operational parameter space. The optimized design achieves a natural emittance of approximately 0.8 nm and a transverse damping time of around 1.46 ms, enabling the efficient buildup of coherent radiation. Three-dimensional numerical simulations, incorporating the previously proposed angular dispersion-induced microbunching (ADM) mechanism, further confirm the system’s capability to generate high-power EUV coherent radiation, with output powers reaching the order of several hundred watts. These results underscore the strong potential of the proposed design for applications in coherent photon science and EUV lithography.

Abstract

We present the physical design and systematic optimization of a high-performance storage ring tailored for the generation of high-power coherent radiation, with particular emphasis on the extreme ultraviolet (EUV) regime. The proposed ring adopts a Double Bend Achromat (DBA) lattice configuration and integrates 12 superconducting wigglers to significantly enhance radiation damping and minimize the natural emittance. And a bypass line is adopted to generate high power coherent radiation. Comprehensive linear and nonlinear beam dynamics analyses have been conducted to ensure beam stability and robustness across the operational parameter space. The optimized design achieves a natural emittance of approximately 0.8 nm and a transverse damping time of around 1.46 ms, enabling the efficient buildup of coherent radiation. Three-dimensional numerical simulations, incorporating the previously proposed angular dispersion-induced microbunching (ADM) mechanism, further confirm the systems capability to generate high-power EUV coherent radiation, with output powers reaching the order of several hundred watts. These results underscore the strong potential of the proposed design for applications in coherent photon science and EUV lithography.

关键词

storage ring/lattice design/beam dynamics/angular disperison-induced microbunching

引用本文复制引用

Lu, Dr. Yujie,Liu, Mr. Ao,Li, Dr. Changliang,WANG, Mr. Kun,Zhang, Mr. Qinglei,Wan, Dr. Weishi,Fan, Dr. Weijie,Liu, Mr. Junhao,Li, Dr. Ruichun,Wang, Mr. Yanxu,Wu, Dr. Konglong,Li, Prof. Ji,Feng, Dr. Chao.Lattice design of a storage-ring-based light source for generating high-power fully coherent EUV radiation[EB/OL].(2026-02-16)[2026-02-27].https://chinaxiv.org/abs/202602.00197.

学科分类

物理学

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首发时间 2026-02-16
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