一种基于环形振荡器的全数字片上PVT传感器
An All-Digital On-Chip PVT Sensor Based on Ring Oscillators
摘要
介绍了一种基于环形振荡器实现的全数字片上PVT传感器，能够实现对工艺角、电压以及温度的同时监测。该传感器采用多种类型的环形振荡器组合，将PVT状态转化为频率信息，再通过计数器将频率转化为数字码，即可获得当前的芯片PVT状态。该设计方案免去了复杂的模拟电路模块，与先进工艺的数字电路具有更好的兼容性。该PVT传感器采用14nm FinFET工艺设计。仿真结果表明，在0.8V供电电压下，工艺角传感器能够区分TT、SS以及FF三个工艺角；电压传感器在700mV到800mV范围内的最大误差小于±2mV；温度传感器在-40℃到120℃的温度范围内，误差范围为+2.69℃至-2.24℃，电压敏感度最大为0.041℃/mV。
Abstract
This paper introduces a fully digital on-chip PVT sensor based on ring oscillators, capable of simultaneously monitoring process corners, voltage, and temperature. The sensor uses a combination of multiple types of ring oscillators, converting PVT variations into frequency information, which is then transformed into digital codes via a counter, allowing the current PVT status of the chip to be obtained. This design eliminates complex and large-area analog circuit modules and has good compatibility with digital circuits in advanced processes. The PVT sensor is designed using a 14 nm FinFET process. Simulation results show that under a standard supply voltage of 0.8V, the process corner sensor can distinguish the three main process corners TT, SS, and FF; the voltage sensor has a maximum error of less than ±2mV within the range of 700mV to 800mV; the temperature sensor has an error range of 2.69 C to -2.24 C within the temperature range of -40 C to 120 C, with a voltage sensitivity of 0.041 C/mV.关键词
PVT传感器/环形振荡器/零温度延时点/FinFETKey words
Process-Voltage-Temperature (PVT) Sensors/ Ring Oscillator/ Zero-Temperature-Delay Point/ FinFET引用本文复制引用
刘畅,熊波涛.一种基于环形振荡器的全数字片上PVT传感器[EB/OL].(2026-03-30)[2026-03-31].http://www.paper.edu.cn/releasepaper/content/202603-292.学科分类
微电子学、集成电路
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