一种新的MEMS连续可调激光器的设计

In this paper, the principle of MEMS tunable Laser is first analyzed according to the recent good results and flaws in the experiments, and then the factors that affect the tenability is summed up. Changes are made to traditional Littman and Littrow structure, and a new idea of the back mirror is stated. Geometry and numerical methods are used to solve the function of the mirror, and the figures such as the grating period, are determined. The design not only provide Lased light of 1625~1665nm, that is C band, but also can be broadened to S and L bands. The structure turns rotation into translation, and resolution of the tuning is 0.7μm/nm, improving the stability of tuning largely. The whole design is convenient to be integrated with other devices. The design can directly put into fabrication flow, and satisfies all the requirement of WDM system.