交叉指传感器结构参数的正交优化设计

Interdigital sensors are widely used in nondestructive testing for physical properties of manufactures, with the advantages of one-side access, controllability of signal strength, imaging capability, etc. The sensitivity and penetration depth are the major influential factors of the meas- -urement precision, which are determined by the structural parameters , such as the wavelength, the length of electrodes and numbers. The paper studied the orthogonal optimization design, obtained the optimizing parameters and improved the characteristics. The structure parameters of 2D,3D model for two wavelength is designed. The results show the effectivity and efficiency of the orthogonal optimization.