分子自组装膜在石墨烯场效应晶体管中的应用研究
pplication of self-assembled monolayer in field effected transitors based on graphene
本文主要介绍一种场效应晶体管的制备方法。通过组装单层的十三氟辛基三甲氧基硅烷、9-蒽甲基磷酸和3-氨基丙基三甲氧基硅烷的分子自组装膜来修饰二氧化硅介电层，化学气相沉淀法制备石墨烯作半导体层，真空蒸镀Au作源、漏电极制备有机场效应晶体管。经实验分析，经以上三种自组装分子修饰的器件与未经处理的石墨烯半导体器件相比，其空穴迁移率与电子迁移率都有大幅度的提升，最高空穴迁移率可达2904 cm2 /Vs、电子迁移率为2243 cm2 /Vs。
his paper introduces a method of preparing field-effect transistors.Three moleculars(PMTS、ATS、AYPA) are used as self-assembled monolayer to modify dielectric layer. Graphene layer made by CVD as semiconductor layer, and vacuum depositiong 30 nm Au as drain or source to fabrication transistor. Compared with the transistors without SAMs, the transistors with SAMs(PMTS、ATS、AYPA) show beter performance with hole mobility of 2904 cm2 /Vs and electron mobility of 2243 cm2 /Vs.
李哲峰
半导体技术微电子学、集成电路电子元件、电子组件
石墨烯场效应晶体管分子自组装薄膜
graphenefield-effect transistorsself-Assembled monolayer
李哲峰.分子自组装膜在石墨烯场效应晶体管中的应用研究[EB/OL].(2014-12-25)[2025-07-25].http://www.paper.edu.cn/releasepaper/content/201412-794.点此复制
评论