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一种改进的载频交叠重构干涉术在光纤干涉投影三维面形测量中的应用

n improved Carrier squeezing interferometry's application in3-D shape measurement of fiber-optic interferometer projection

中文摘要英文摘要

基于时空条纹图的载频交叠重构干涉术(CSI)法具有消除小范围移相误差的能力,本文在CSI法基础上提出一种改进的消除移相误差相位提取算,在原理上能够消除任意等级移相误差。文中将这种方法应用在易受环境影响的移相法光纤干涉投影三维面形测量中,能够消除移相误差在测量结果中引起的寄生条纹和干涉条纹散斑引起的高频噪声。仿真结果显示在±20°的随机移相误差范围内,本文方法较四步移相算法测量精度提高近百倍。另外文中求取了不同移相误差等级下100次平均面形恢复误差均方根(ERMS)值,在以四步移相法为例的测试过程中,每步移相误差控制在±18°以内,则ERMS值能控制在1.31×10-3mm以内。

he Carrier squeezing interferometry (CSI) algorithm based on spatial-temporal fringes can eliminate phase-shifting error of small range. In this paper an improved phase extraction method based on CSI algorithm is proposed, which can eliminate any order phase-shifting error in principle.In this paper, this method was applied in the environmentally sensitive 3-D shape measurement of phase-shifting fiber-optic interferometer projection to eliminate the parasitic fringe caused by phase-shifting error and high-frequency noise caused by interference fringe speckle and so on in test result. The simulation result shows thatthe measurement accuracy of suggested method is near hundred fold than four-step phase shifting method at ±20°random phase error. In addition, we recover surface 100 times in different grades of phase-shifting error to solve averageError Root Mean Square (ERMS) value. For example, in the measuring process of four-step phase shifting method, the ERMS value can be controlled within 1.31×10-3 mm when phase-shifting error of every step is less than ±18°.

朱荣刚、何勇、李建欣、朱日宏

光电子技术

光学测量时空条纹图相位误差光纤投影干涉测量

optoptical measurementspatial-temporal fringesinaccurate phase shiftfiberoptical projectioninterferometry

朱荣刚,何勇,李建欣,朱日宏.一种改进的载频交叠重构干涉术在光纤干涉投影三维面形测量中的应用[EB/OL].(2017-05-12)[2025-08-06].http://www.paper.edu.cn/releasepaper/content/201705-823.点此复制

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