直接驱动XY平台PI扰动补偿控制

For the XY table which is driven by two permanent magnet linear synchronous motors system (PMLSM), in order to weaken the influence of contour machining accuracy from External disturbance and achieve high-precision contour tracking control of XY table. A PI disturbance compensator（VPDC）was designed on the single-axis controller which is using transfer function method to analyze the relationship between the disturbance torque estimated value and the actual value of the disturbance torque. In addition, PI disturbance compensator utilizes angular acceleration signal disturbance compensator which is constructed to external disturbance for compensation control and analyses the effect of the control system after joining the disturbance compensation. Meanwhile the real time contour error calculation algorithm applicable for multi- axis nonlinear contour control was adopted and the real time contour error model of XY table for free- form contour following task was built．Simulation results show that the control system based PI disturbance compensator has a strong anti-interference and high contour accuracy.