基于多孔硅微腔微阵列的制备及检测

By combining photolithography with the electrochemical anodization method, A 8*8 square matrix of Porous Silicon one dimensional photonic crystals, each one of 300μm diameter and spaced by 200μm, the microarray device of porous silicon photonic crystal was fabricated on the crystalline silicon substrate. The optical properties of the microarray were analyzed at 633nm was also studied. The change of the reflectivity of the array element is analyzed observed through digital imaging. Using the Porous Silicon Microcavity Microarray device, we can realize the rapid detection by using the digital image measurement method. The results of this study can be applied to the study of biosensor arrays.