智能MEMS气体传感器中微加热器的优化设计

raditional metal-oxide gas sensors are usually used to measure the flammability of hydrocarbon gases and other toxic gases. However, they are the existence of two defects, namely (a) higher operating temperature (not less than 300 ℃) and (b) greater power (more than one watt). Being developed by micro-silicon metal-oxide gas sensors to overcome these deficiencies. Micro-machined gas sensor including the majority of power through the silicon substrate conduction heat loss through all the contact surfaces and radiation transfer to the air. Micro-machined metal oxide gas sensor of the hot line to address low-power characteristics are optimized through the sensing layer and the transient response of the control of appropriate temperature distribution. However, MEMS metal oxide gas sensors in the micro-heater has not been optimized. In this paper, we have developed a method (software) used in the design and optimization of MEMS gas sensor micro-heater. The use of this software can estimate the power required to reach a certain temperature as well as the active layer temperature distribution.