基于石英挠性加速度传感器的测量系统设计
cceleration Measurement System Based on Quartz Flexible Accelerometer
根据石英加速度传感器内部的差动电容结构,设计了一种利用谐振电路幅频特性测量加速度的高精度、高稳定度的测量方法。该测量方法基于输入信号在不同谐振频率时幅度不同的测量原理,将加速度转化为电压量。经A/D采集后得到的数据通过FPGA读取以及USB传输。最后使用标准加速度计对完成后的加速度测量系统进行了标定,并进行灵敏度、重复性和稳定性测试。实验的结果表明,该系统可实现高精度、高稳定度的测量。
Based on the differential capacitor structure of quartz accelerometer, this paper designs a measurement method for high precision and stability using the amplitude and frequency characteristics of the resonant circuit. This method is based on the principle that the amplitude of the input signal is different in distinct resonance frequency. After the A/D conversion, the data collected is read by the FPGA and transmitted through USB. At last the acceleration measurement system is calibrated with a standard accelerometer, and also the sensitivity and stability of this system are tested. The result turns out that this system can realize the measurement of high precision and stability.
郁然、钟志
电子元件、电子组件电子电路无线电、电信测量技术及仪器
加速度测量谐振法石英挠性加速度传感器差动电容检测
acceleration measurementresonance methodquartz flexible accelerometerdifferential capacitance detection
郁然,钟志.基于石英挠性加速度传感器的测量系统设计[EB/OL].(2016-01-12)[2025-08-16].http://www.paper.edu.cn/releasepaper/content/201601-265.点此复制
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