一种三自由度微机器人直线位移检测方法研究

s an important scheme to improve the performance of an industrial robot, the macro-micro structure is studied in recent years. This paper developed a linear displacement detection system aiming to the requirements on high detection accuracy, high response speed and small volume of the 3-DOF micro robot in a macro-micro manipulator system. In the system, a detection technology of position feedback based on modulation and demodulation is proposed and realized. The experimental results show that the system meets the use requirements of the micro robot.