一种新型的具有圆锥形结构的集成解复用光探测器
novel demultiplexing photodetector with integrated vertical conical structure
介绍了一种新型的适用于波分复用（WDM）系统的光探测器，此探测器在结构上由滤波腔和吸收腔两部分组成。滤波腔是由四个Fabry-Pérot (F-P)腔级联耦合构成，能达到平顶陡边的光谱响应。吸收腔由PIN探测器和一个圆锥形的顶镜组成，圆锥形顶镜用于增加光在吸收腔中的反射次数，从而使光多次经过吸收层增大量子效率。通过理论分析和优化设计，此结构探测器的量子效率在入射光为1550nm处的峰值量子效率能达到88.87%。另外，器件有很好的平顶陡边光谱响应性能：对中心波长为1550nm的入射光0.5dB带宽为0.4nm，3dB带宽为0.56nm，20dB带宽为0.98nm，具有很好的波长选择性能。
novel demultiplexing photodetector which consists of a filtering cavity and a conical absorption cavity is proposed. The filtering cavity is formed by four coupled F-P(Fabry-Pérot) cavities, which can realize flat-top and steep-edge spectral response. The top mirror of the absorption cavity is designed to be conical, which can increase the times of light reflection. Then the quantum efficiency is improved. Through the theoretical analysis and simulation, the peak quantum efficiency of the photodetector is 88.87% around 1550nm. In addition, this photodetector has good performance in the flat-top and steep-edge spectral response: the 0.5dB bandwidth is 0.4nm, the 3dB bandwidth is 0.56nm and the 20dB bandwidth is 0.98nm.
刘庆、黄永清
光电子技术半导体技术
光探测器圆锥形结构量子效率平顶陡边光谱响应
photodetectorvertical conical structurequantum efficiencyflat-top and steep-edge spectral response
刘庆,黄永清.一种新型的具有圆锥形结构的集成解复用光探测器[EB/OL].(2013-01-02)[2025-08-06].http://www.paper.edu.cn/releasepaper/content/201301-12.点此复制
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