硅烷流量对电弧离子镀TiSiN 涂层结构和性能的影响

iSiN nanocomposite hard coatings have been deposited onto silicon and cemented carbide substrates by a vacuum cathodic arc ion plating system using high purity Ti target under SiH4 ambient. The effects of SiH4 flowrate on the microstructure, mechanical and tribological properties of the coatings were investigated systemically. Transmission electron microscopy and X-ray diffraction techniques were employed to probe the microstructure. X-ray photoelectron spectroscopy was used to investigate the chemical bonding states. Microhardness testers and tribometer were used to evaluate the mechanical and tribological properties of TiSiN nanocomposite coatings. The results showed that with increasing SiH4 flowrate, TiSiN coating structure varied from columnar grain to nanocrystalline composite coatings, where obvious TiN nanograins could be observed. The hardness of the coatings increase continuously up to 4100 HV0.025 at 42 sccm SiH4 flowrate (6.3 at.% Si content) and then decrease with further addition of SiH4 flowrate. The coefficient of friction of TiSiN composite coatings was kept at a relatively higher value in the range of 0.6-0.7 when the mating materials are Si3N4 balls. SiH4 flowrate exhibited significant influence on the microstructure and properties of TiSiN composite coatings.