Millimeters-Stroke Nanopositioning Actuator With High Positioning and Thermal Stability
his paper presented the design and modeling of a novel nanopositioning actuator that delivers millimeters stroke with high positioning and thermal stability. This actuator comprises a unique electromagnetic driving module [EDM] articulated from a segment
his paper presented the design and modeling of a novel nanopositioning actuator that delivers millimeters stroke with high positioning and thermal stability. This actuator comprises a unique electromagnetic driving module [EDM] articulated from a segment
Teo, TJ [Teo, Tat Joo][ 1 ]、Chen, IM [Chen, I-Ming][ 4 ]、Bui, VP [Viet Phuong Bui][ 2 ]、Yang, GL [Yang, Guilin][ 3 ]
机械设计、机械制图自动化技术、自动化技术设备机械零件、传动装置
Flexure modelingintegral equation [IEnanopositioningpermanent magnet [PM] circuitsthermal modeling
Teo, TJ [Teo, Tat Joo][ 1 ],Chen, IM [Chen, I-Ming][ 4 ],Bui, VP [Viet Phuong Bui][ 2 ],Yang, GL [Yang, Guilin][ 3 ].Millimeters-Stroke Nanopositioning Actuator With High Positioning and Thermal Stability[EB/OL].(2017-05-02)[2025-07-21].https://chinaxiv.org/abs/201705.00574.点此复制
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