阳极键合用R2O-Al2O3-SiO2系微晶玻璃电学性能的研究

In this study, R2O-Al2O3-SiO2 system glass ceramics were used as anodic bonding materials, the effects of the heat treatment schedules on the electrical properties (dielectric constant, dielectric loss and conductivity) were discussed. The results showed that the main crystal phase of glass ceramics was lithium metasilicate(Li2SiO3); Comparing to the basic glass, both the dielectric constant and dielectric loss of glass ceramics decreased; the dielectric constant and dielectric loss were increased gradually with the increasing of the test temperature from room temperature to 400℃. Testing frequency（30MHz～300MHz）had very little influence on the performance of samples; with the rising of the temperature, the electrical conductivity of glass ceramics showed a trend of first decreasing and then increasing. The glass ceramics which had lower dielectric constant and dielectric loss, better stability under high frequency was obtained with an appropriate heat treatment schedule, which could be used as anodic bonding materials under high frequency.