退火温度对NdFeB薄膜磁性能的影响
he Influence of Annealing Temperature on the Magnetic Properties of NdFeB Films
采用磁控溅射法制备了Mo/Nd/NdFeB/Nd/Mo多层薄膜，利用X射线衍射仪、振动样品磁强计及原子力显微镜对不同温度退火后的薄膜样品的晶体结构和磁性能进行了测试分析。结果表明，随退火温度的升高，薄膜的矫顽力与最大磁能积均先增大后减小，其中630℃退火的薄膜样品的磁性能及方形度最好。最佳条件下，永磁薄膜面内和垂直方向矫顽力分别达到21.8 kOe和15.2 kOe，最大磁能积分别为19.0 MGOe和11.9 MGOe。
Mo/Nd/NdFeB/Nd/Mo multilayer thin films were prepared by magnetron sputtering. The crystal structure and magnetic properties of samples annealed at different temperature were studied by X-ray diffraction, vibrating sample magnetometer and atomic force microscope. It was found that the films coercivity and the maximum magnetic energy product increased first and then reduced with increasing the annealed temperature, the film that annealed at 630 ℃ has the best magnetic properties and square degree. The best magnetic properties of the in-plane and perpendicular coercivity are respectively 21.8 kOe and 15.2 kOe, and the maximum magnetic energy are respectively 19.0 MGOe and 11.9 MGOe.
张敏刚、刘丽、刘文峰、李敏杰、陈峰华
材料科学物理学晶体学
NdFeB永磁薄膜，退火温度，相结构，磁性能
NdFeB permanent magnetic thin filmsthe annealing temperaturephase structuremagnetic properties
张敏刚,刘丽,刘文峰,李敏杰,陈峰华.退火温度对NdFeB薄膜磁性能的影响[EB/OL].(2014-01-27)[2025-08-04].http://www.paper.edu.cn/releasepaper/content/201401-1219.点此复制
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