关于电化学还原四氯化硅的研究

s one of the substances during preparation of polysilicon using the Simens, silicon tetrachloride causes se ious pollution and is harmful for human health. With the rapid development of polysilicon industry in recent years, perniciousness of silicon tetrachloride has become even further evident, thus becoming the “bottle neck” for the development of the polysilicon industry. In recent years, some researchers have studied on electrochemical reduction of silicon chloride. In this paper, with alloy of titanium, nickel and niobium as the working electrode, we revert the silicon tetrachloride into silicon which deposits on the working electrode in nonaqueous solvent, and then character the sample through SEM and EDS.