低应力、高弹性、较高硬度的含氢碳膜
low-stress, elastic and improved hardness hydrogenated amorphous carbon film
研究了不同氢气流量下制备的含fullerene-like微结构氢化碳膜的结构和机械性能，并探讨了fullerene-like微结构含量和机械性能之间的关系。实验发现，相对于无氢气辅助沉积的样品,在氢气流量50 sccm沉积的样品表现出较低的压应力 (低48.6%)、高的弹性恢复(高19.6%,弹性恢复系数接近90%)和较高的硬度(高7.4%)。当氢气流量小于50sccm时，样品中fullerene-like含量随氢气流量增加而增加，薄膜具有较好的机械特性。薄膜中低的氢含量有利于fullerene-like结构的形成。当氢气流量为100sccm时，大量孔隙的形成导致样品结构松散，机械性能变差。结构分析表明薄膜包含相对高的sp2含量和低的氢含量是薄膜高硬度、弹性恢复率和较低压应力的起因。
he evolution of hydrogenated amorphous carbon films with fullerene-like microstructure was investigated with the proportion of hydrogen in introduction. The results showed that the films deposited at hydrogen flow rate 50sccm exhibited lower compressive stress (lower 48.6%), higher elastic recovery (higher 19.6%, near elastic recovery rate 90%) and higher hardness (higher 7.4%) than the films deposited without hydrogen introduction. Structural analysis showed the film had relatively high sp2 content and low bonded hydrogen content possessed high hardness, elastic recovery rate and low compressive stress. It was attributed to the curved graphite microstructure, which can form three-dimensional covalently bonded network.
张俊彦、王琦、贺德衍
材料科学
非晶碳膜类富勒烯机械性能
microstructurecoatingsmechanical propertiesX-ray photo-emission spectroscopy (XPS)
张俊彦,王琦,贺德衍.低应力、高弹性、较高硬度的含氢碳膜[EB/OL].(2013-08-02)[2025-08-18].http://www.paper.edu.cn/releasepaper/content/201308-26.点此复制
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