铝阳极氧化膜纳米孔阵列微细结构的研究
Study on the microstructure of anodic aluminum oxide films by AFM
采用电化学阳极氧化法，获得多孔铝阳极氧化膜，又称AAO模板。扫描电镜形貌照片表明，纳米孔呈规则的阵列排布。为了研究纳米孔阵列的形成机制，本文在上述研究工作基础上，采用原子力显微镜（AFM）对AAO膜进行测试，发现在AAO膜的表面，除存在六方形的纳米孔阵列外，孔端还存在六个微小的隆起，相邻的隆起之间彼此相连，看上去酷似一朵盛开的梅花，花的中心就是六方形纳米孔。AFM的二维图像清晰地显示，以往用扫描电镜表征的纳米孔阵列，实际上是一幅排列得非常整齐、并呈周期性变化的梅花阵列图案。膜背面阻挡层的AFM二维图像表明，膜胞呈六方形，且排列高度有序。膜胞密度为4.3×109/cm2，与孔密度基本一致。阻挡层的三维照片显示，膜胞的底部存在半球状突起，也呈现出规整的阵列图案。此外，本文还讨论了孔和膜胞阵列的AFM表征及其研究方法，初步分析了微细结构的形成机制。
he anodic aluminum oxide film, namely, AAO film was prepared with the electrochemical anodization method. It could be found that the arrangement of the nanopores in AAO film is highly ordered. In order to investigate the formation reason of the nanopore array, the microstructure of anodic aluminum oxide (AAO) film was particularly studied by AFM in this paper. It shows that except hexagonal pore array in AAO film there are six small apophyses along the surface of pore wall like plum blossom. There exists a low dent between every two-neighborhood apophyses and the shape of the pore at the center of the blossom is hexagon. The nanopore arrays are actually a highly ordered plum blossom patterns. AFM image of barrier layer shows that cells are arranged in a regular hexagonal network structure. The shape of the cell is also hexagon and the bottom of each cell has a hemi-sphere protuberance structure. Furthermore, the causes of formation of these microstructures were discussed in detail and
宋兆爽、孔亚西、姚素薇、张璐
材料科学金属学、热处理
无机非金属材料 多孔阳极氧化铝膜（AAO） 微细结构 原子力显微镜（AFM）
inorganic non-metallic materials anodic aluminum oxide film (AAO film) microstructure atom force microscopy (AFM)
宋兆爽,孔亚西,姚素薇,张璐.铝阳极氧化膜纳米孔阵列微细结构的研究[EB/OL].(2004-11-26)[2025-08-16].http://www.paper.edu.cn/releasepaper/content/200411-117.点此复制
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