Sb掺杂SnO2透明导电膜的溶胶-凝胶法制备及其性能研究

onductive thin films of Sb-doped tin oxide were prepared by using inorganic metallic salt SnCl4•5H2O and SbCl3 as precursors through sol-gel process. The influences of the reflux time of sol、the addition amount ofSbCl3、the coating layers and the heating treatment temperature to the sheet resistance and transmittance of the thin films have been investigated. The experimental results show that the SnO2: Sb thin films deposited by sol-gel processing have favorable conductivity and transmittance in visible light range. The sheet resistance of the SnO2 with 10mol% Sb-doping annealed at 400℃ can reach 107Ω/ □, the average transmittance of the SnO2: Sbfilms was 80%.