微米、纳米及微纳米复合金刚石涂层的制备和性能研究

iamond coatings prepared by HFCVD method have gained much attention in the field of cemented carbide tools and moulds. In this paper, micro- nano- and micro-nano diamond coatings were prepared on cemented carbide under the optimized parameters. SEM, Rockwell hardness tester, X-ray diffractometer and MSE tester were used to evaluate the properties of the diamond coatings. The results show that hardness of the micro diamond coating is the highest, adhesion between the substrate and the diamond coating is the best of the three, and micro-nano composite diamond coating has qualities of both the micro diamond coating and nano diamond coating.