硅基ZnO纳米棒阵列薄膜的表面光伏特性研究

In this paper, ZnO nanorod arrays were prepared by seed-assisted chemical bath deposition, in which the ZnO films prepared by magnetr on sputtering were used as the seed layers on the P-Si (100) substrate. ZnO nanorod array, synthesized by wet chemical bath deposition method, which was characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and photoluminescence (PL) spectroscopy. The results show that ZnO nanorods with very few defects, which is basically along the c-axis growth, have good UV light-emitting characteristics. Surface photovoltage (SPV) technique was employed to investigate the surface photovoltage behavior of ZnO nanorod array. The surface photovoltage and its time-resolved evolution process are used to determine the energy level structure of the ZnO nanorod array. As a result, the life level of the photoelectron in Si-based ZnO nanorod arrays is very few.