氢气对化学气相沉积热解炭的影响

Using hydrogen and nitrogen as carrier gas respectively, we studied pyrocarbon deposition on graphite paper from 1:10 propylene/carrier gas at ambient pressure and 900℃ with self-made apparatus. The effect of hydrogen on the micro-environment of chemical vapor deposition (CVD) was explored. The intermediates in the deposition zone were analyzed by GC and GC-MS, and the microstructure of pyrocarbon was determined by HRSEM and Raman. The results showed that, compared to nitrogen, hydrogen inhibited the deposition of pyrocarbon and lowered the texture, which is mainly because that hydrogen changed the ratio of small aliphatic hydrocarbons to large aromatic hydrocarbons.