基于C-MEMS的纳米线的制备及其热电性能的研究方法
Large-scale Synthesis and characterization methods of the nanowires based on C-MEMS
大量的理论和实验证明，低维化能提高材料的热电性能。通过研究发现氮氧硅纳米线可能具有良好的热电性能。本文主要介绍了基于C-MEMS的硅纳米线的制备方法及工艺，并介绍了纳米材料的热电性能的研究方法。其中包括纳米薄膜的电导率的检测，以及Seebeck系数的测量。进行对氮氧硅纳米线在热电性能方面的研究以希望开发出新的热电材料。
Large number of theoretical and experimental show that low-dimensional technology can improve the thermoelectric properties of materials.We found SiNXOY nanowires is a potential thermoelectric material.This article describes the growth of the silicon nanowires based on C-MEMS and introduces the methods to obtain the thermoelectric properties(conductivity and the Seebeck coefficient) of nanomaterials.Further research will be taken of SiNXOY nanowires on thermoelectric performance to synthesize a new potential thermoelectric material.
徐亮亮、刘丹、习爽、汤自荣、龙胡
半导体技术微电子学、集成电路材料科学
半导体技术-MEMS纳米结构热电性能热电材料
semiconductorC-MEMSnanostructurethermoelectric performancethermoelectric materials
徐亮亮,刘丹,习爽,汤自荣,龙胡.基于C-MEMS的纳米线的制备及其热电性能的研究方法[EB/OL].(2012-01-19)[2025-08-02].http://www.paper.edu.cn/releasepaper/content/201201-733.点此复制
评论