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微尺度激光喷丸强化TiN涂层的实验研究

Experimental Study of Microscale Laser Shock Peening on TiN Coating

中文摘要英文摘要

微尺度激光喷丸强化是在宏观激光喷丸强化的基础上发展而来的一种主要应用于金属微构件表面处理的新技术,其采用的激光光斑尺寸在μm量级,脉冲激光能量在μJ~mJ范围。为了进一步提高TiN涂层的表面性能,对TiN涂层表面进行了微尺度激光喷丸强化处理。利用光学轮廓仪和纳米力学测试系统测量了不同激光工艺参数作用下,TiN涂层喷丸区域的表面形貌、纳米硬度及弹性模量分布。结果表明,喷丸区域形成了最大深度约1.2μm的圆锥形凹坑;纳米硬度和弹性模量在喷丸中心处变化最大并在一定范围内随着激光能量的增大而增大,当激光能量为250mJ时,两者最大分别达到50.21GPa和402.8GPa,与初始状态相比分别提高了140%和43.9%。

Microscale laser shock peening (μLSP) based on laser shock peening (LSP) is a novel surface modification technology aimed at metal microstructures, with micrometers laser spot and μJ~mJ laser energy. μLSP on TiN coating is investigated in this study to further improve the surface properties of TiN coating. Optical profile and nano mechanical test system were used to observe and measure the surface morphology, nano-hardness and elastic modulus of TiN coating in peening area. The experimental results show that a conical dent was formed in peening area after μLSP, the biggest depth is about 1.2μm; the nano-hardness and elastic modulus were significantly changed in the center of peening area, and within a certain range, they are enhanced with the increase of laser energy. When the laser energy is 250mJ, the nano-hardness and elastic modulus are both reached the maximum, 50.21GPa and 402.8GPa respectively. Compared with the initial state of TiN coating before μLSP, they are increased by 140% and 43.9% respectively.

卫登辉、黄舒、朱伟、周建忠、樊玉杰

材料科学金属学、热处理

激光技术激光喷丸强化iN涂层表面形貌纳米硬度

Laser techniqueLaser shock peeningTiN coatingSurface morphologyNano-hardness

卫登辉,黄舒,朱伟,周建忠,樊玉杰.微尺度激光喷丸强化TiN涂层的实验研究[EB/OL].(2011-06-13)[2025-08-16].http://www.paper.edu.cn/releasepaper/content/201106-239.点此复制

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