一种基于形貌配准分析的精密主轴回转精度检测方法

new precision spindle rotational error measurement method based on the registration analysis of motion topography is proposed. The surface topography of the test sample on the platform rotating by a precision spindle is measured and data registration image motion analysis is carried out. The radial and axial rotation error data of the precision spindle can be obtained simultaneously. Series of works are carried out including the rotating error modeling, fabrication of the test sample with special microstructures, image registration method selecting and parameters seeking, and so on. The precision spindle rotating errors test experimental system with nano-accuracy is established using the Atomic Force Microscope (AFM) probe as a sensor. A rotational error measurement test is performed and the feasibility of this method is verified. The method and the corresponding experimental system in our work are expected to provide a new way of testing the rotating error of high-precision spindles with features of simple principle and wide applicability.