硅微陀螺仪的芯片级温控实验研究
he Experiment Research of On-chip Temperature Control of the Silicon Micro-gyroscope
研制了芯片级温控硅微陀螺芯片,设计芯片级温控电路和陀螺测控电路，并对芯片级温控电路进行了仿真，仿真结果表明温度系统在4秒内达到了稳定。对加工出的芯片级温控陀螺芯片进行了真空封装，研制了芯片级温控硅微陀螺样机。对芯片级温控陀螺样机进行了实验研究，实验结果表明陀螺样机标度因数温度系数由533.7 ppm/℃减小到241.6 ppm/℃，陀螺样机零偏温度系数由45.2°/h /℃减小到13.7°/h /℃。可见通过芯片级温控技术，明显优化了陀螺样机的温度特性。
he micro-gyroscope with on-chip temperature control is researched. The circuit of on-chip temperature control and the detective & control of the micro-gyroscope is designed.The circuit of on-chip temperature control is simulated. The simulation results show that the temperature control system reachs the steady-state within the 4 second. The micro-gyroscope with on-chip temperature control is encapsulated in the vacuum condition. The prototype of micro-gyroscope with on-chip temperature control is achieved and experimented. The experiment results indicate that the temperature coefficient of the scale factor is reduced from 533.7 ppm/℃ to 241.6 ppm/℃ and the temperature coefficient of the zero bias is decreased from 45.2°/h /℃ to 13.7°/h /℃. It is evident that the temperature sensitivity characteristics of the micro-gyroscope is obviously improved by the on-chip temperature control.
曹慧亮、徐露、杨波
微电子学、集成电路半导体技术电子电路
硅微陀螺仪芯片级温控零偏温度系数
silicon micro-gyroscopeon-chip temperature controltemperature coefficient of zero bias
曹慧亮,徐露,杨波.硅微陀螺仪的芯片级温控实验研究[EB/OL].(2011-12-31)[2025-07-25].http://www.paper.edu.cn/releasepaper/content/201112-929.点此复制
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