不同绝缘膜上酞菁氧钒有机薄膜晶体管的研究
he Study of VOPc OTFTs on Various Organosilane Self-assembled Monolayer Modified Substrates
研究了不同修饰衬底对酞菁氧钒(VOPc)有机薄膜晶体管的影响。通过绝缘层表面的静态接触角、酞菁氧钒薄膜的AFM图谱以及XRD图谱来分析判定不同自组装修饰层对器件I-V特性的影响。影响VOPc薄膜生长和OTFTs器件性能的原因既包含界面的亲疏水性能,也包括有机硅烷中烷基链的长度及端基结构。修饰层中不含卤族元素的长链基团能够很好地隔绝VOPc与绝缘层之间的相互作用,并降低绝缘层表面的陷阱浓度,利于形成大晶粒尺寸的、平整连续的、高取向度的有机半导体薄膜,从而提高内部载流子的传输效率。这些结论的得出对今后有机半导体薄膜的生长、有机薄膜晶体管性能的提升以及器件的封装技术具有很好的指导意义。
he vanadyl phthalocyanine thin film transistors were fabricated on the various organosilane self-assembled monolayer (SAM) modified substrates, and how the performance of these transistors affected by the surface properties was studied. The morphologies and X-ray diffraction (XRD) spectrums of vanadyl phthalocyanine films on different SAM-modified surfaces were studied. The study of atomic force microscopy (AFM) and XRD reveals that the vanadyl phthalocyanine film on octadecyltrichlorosilane (OTS) modified substrate has much larger crystal size and better crystalline than those on phenyltrichlorosilane (PTS), 1H,1H,2H,2H-Perfluorodecyltrichlorosilane (FDTS) as well as non-modified substrates, and which contributes that the mobility of corresponding device is several and several dozen times relative to other ones. In addition, by means of static contact angle measurements, the wettabilities of water on silicon dioxide substrates modified with various organosilane SAMs were studied. The results of static contact angle measurements, XRD and AFM reveal that not only the surface hydrophobicity but also the length and type of organic capping group in organosilane SAMs affect the growth of VOPc films and device performance. The highest mobility for the transistor on OTS treated substrates may be due to that the attractive force between VOPc and OTS modified surface is smallest. The crystalline and crystal grain size of VOPc film on PTS is somewhere in between that on OTS treated and non-modified substrate may be the existence of attractive force between VOPc and SiO2 for the length of phenyl group in PTS is much shorter than alkyl chain group in OTS. The VOPc films' performance and crystalline on FDTS treated are worse than that on PTS, which may be the existents of attractive force between -CF3 and VOPc.
宋德、崔宁
半导体技术微电子学、集成电路
自组装薄膜界面特性有机薄膜晶体管
Organosilane self-assembled monolayerSurface propertiesOrganic thin film transistors
宋德,崔宁.不同绝缘膜上酞菁氧钒有机薄膜晶体管的研究[EB/OL].(2015-11-25)[2025-07-25].http://www.paper.edu.cn/releasepaper/content/201511-526.点此复制
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