发泡海绵过滤防尘网过滤性能的实验研究
Experimental study on the filtration performances of foam sponge filter
空气过滤材料的过滤性能是阻碍芯片制造技术进步的关键问题之一。本研究选取了发泡海绵过滤防尘网作为研究对象，对其微观结构进行了分析。同时设计并开发了空气过滤材料过滤性能测试装置，对发泡海绵过滤防尘网的过滤性能进行了实验研究。研究结果表明：随着孔隙率的降低和过滤速度的降低，发泡海绵过滤防尘网的过滤效率增加；而随着相对湿度的增加，发泡海绵过滤防尘网的过滤效率增加。
Filtration performance of air filter material is one of the key problems that hinder the progress of the chip manufacturing technology. Foam sponge filter is experimentally researched in the paper. Its microscope structure is analyzed. Meanwhile, air filter testing rig is developed and filtration performances of foam sponge filter is stuied. The results shows: filtration efficiency increaeses with the decrease of pore size and velocity and the increase of relative humidity.
毛宁、孙熙
材料科学
发泡海绵过滤防尘网孔隙率滤速相对湿度
Foam sponge filterPore sizeVelocityRelative humidity
毛宁,孙熙.发泡海绵过滤防尘网过滤性能的实验研究[EB/OL].(2013-05-06)[2025-08-03].http://www.paper.edu.cn/releasepaper/content/201305-95.点此复制
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