近场头盘间距光学测量方法研究

Optical measuring technique is the main method for the measurement of deep sub-micron flying height. This paper describes optical flying height measuring techniques, such as intensity interferometry, polarization interferometry, total internal reflection method and laser Doppler method. Operating principle, design feature and applicability of each method are detailed. Based on a near-field optical micro flying head designed independently, a dual-wavelength intensity interferometry is applied with the characteristic of high resolution, rapid dynamic respond, simple structure and better adaptability.