基于PZT的相移控制器的设计

he measurement of the phase shift is the essence of the phase modulation, the selection of phase modulation is the key to phase shifter. This paper selecting PZT phase shift as a white phase-shifting interferometry in the actuator,using PSD displacement photoelectric position sensor for real-time feedback on the size, constitutes a voltage - displacement of the closed-loop control system. The control system has effectively solved the PZT nonlinearity, creep characteristics, hysteresis of phase accuracy to realize a phase shift control system for automation, miniaturization purposes.