磁控溅射制备高熵合金非晶薄膜

In this paper, The amorphous films of AlFeCoNiCuZrV multicomponent high-entropy alloy were deposited by direct current magnetron sputtering in the mixture atmosphere of Ar and O2. The results demonstrate that the chemical composition, microstructure, and mechanical properties of the amorphous films intimately rely on the concentration of O2 in the atmosphere mixture. When O2 flow ratio increases from 0 to 50%, the thickness of the films decreases, whereas the roughness firstly decreases and then increases. At the O2 flow ratio of 30%, a perfect dense and smooth amorphous nitride film could be achieved. While the hardness and Young's modulus of the film reach the maximum values of 12 and 166 GPa, respectively.