盐酸/双氧水刻蚀铜表面摩擦学性能研究

In this paper, the CuCl micro-nano structure on Cu substrate was fabricated by a simple chemical etching process. Then, CuCl film can be further modified by deposited stearic acid film. Scanning electron microscopy, X-ray diffraction, FI-IR Microscope and water contact angle measurement instrument has been performed the morphological feature of the copper surface structure, chemical composition and formation mechanism. The tribological properties of modified copper surface is tested by micro tribotester. The results show that CuCl micro-nano structure can reduce the friction coefficient of copper from 0.67 to 0.37, with the worn scar width decreasing from 200um to 125um. The stearic acid film on the CuCl can further decrease the friction coefficient to 0.1, showing excellent tribological properties.