石英振梁式重力传感器原理误差建模研究

In this paper, the structure of the quartz vibrating beam gravimeter sensor is analyzed and the quartz vibrating beam gravimeter sensor is equivalent to the system of the moment of inertia, the stretch bearing and the damp. The transfer function and the difference frequency formula of the quartz vibrating beam gravimeter sensor under conditions of gravitational acceleration are deduced. The resonance frequency formulas of the error caused by rounding the high order and the differential frequency linearization are deduced. The machining error formulas of the quartz vibrating beam gravimeter sensor are deduced from the flexibility beam size, the quartz resonator size and the mass center offset. The principal error model of the quartz vibrating beam gravimeter sensor is established and the quantitative experiment is carried out. Theoretical analysis and the experiment result indicate that the error of the differential frequency linearization, the machining error of the flexibility beam size and the quartz resonator size are the main error, and the error of differential frequency linearization and mass center offset is the minor error. The principal error quantity is 6×10-7g and the quartz vibrating beam gravimeter sensor satisfies the precise gravity measurement of the grade of 1×10-6g.