不同掺钠工艺对Cu(In,Ga)Se2薄膜电学、结构和形貌的影响
Impact of different sodium incorporation methods on electrical, structural and micrograph properties of Cu(In,Ga)Se2 thin film
在柔性衬底上生长Cu(In,Ga)Se2(CIGS)薄膜,Na的掺入会对薄膜的特性有重要的改善作用。不同的掺Na工艺对薄膜会产生不同的影响。实验中,采用低温三步法在柔性聚酰亚胺衬底上沉积CIGS,并研究了前掺Na和后掺Na两种掺Na工艺对CIGS薄膜电学、结构和形貌的影响。研究发现,当Na存在于CIGS薄膜生长过程中时,会影响In、Ga元素的扩散,X射线衍射(X-Ray Diffraction, XRD)测试发现,薄膜会产生明显的双峰劈裂现象,反映了薄膜中的两相分离,另外,Na的存在还会影响薄膜的生长过程,扫描电镜(Scanning Electron Microscopy, SEM)显示,薄膜的结晶质量会受到影响,造成薄膜晶粒细碎。
Incorporation of sodium into Cu(In,Ga)Se2(CIGS) thin films deposited on flexible substrate leads to a great improvement in the properties of CIGS. Different influences were found by using different sodium incorporation methods. In this work, CIGS was deposited on flexible polyimide (PI) substrate by three-stage process based on low-temperature deposition. Our research focuses on the impact of two different sodium incorporation methods, deposition of a sodium compound precursor and post-deposition treatment of a sodium compound, on electrical, structural and micrograph properties of CIGS thin film. X-Ray Diffraction (XRD) measurement shows that the interdiffusion of In-Ga is restrained, which exhibits a double-peak reflection pattern when sodium is available during the growth of CIGS. In addition, the growth of CIGS is affected due to sodium incorporation, which leads to a decreased grain size observed by means of Scanning Electron Microscopy (SEM).
何静婧、李志国、孙云、刘玮
材料科学
IGS柔性衬底低温沉积Na掺杂
IGSflexible substratelow-temperature depositionsodium incorporation
何静婧,李志国,孙云,刘玮.不同掺钠工艺对Cu(In,Ga)Se2薄膜电学、结构和形貌的影响[EB/OL].(2011-11-04)[2025-08-03].http://www.paper.edu.cn/releasepaper/content/201111-75.点此复制
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