一种有效去除化学机械抛光后残留有机物的新方法

Residue organic matter pollution is introduced in Post-CMP. The theory of the oxidability of peroxide synthesized by the BDD anodes used in the electrochemical is introduced. According to the characteristic of organic matter liable to being oxygenated and decomposed, using the oxidability of peroxide synthesized by the BDD anodes used in the electrochemical to oxygenolysis residue organic matter and coordinate with ultrasonic cleaning, combine physical with chemical method thus achieve the goal wiping off residue organic matter. The experiments show peroxide adding to selecting surface active agent as cleaning agent, plus ultrasonic cleaning, so as to wipe off residue organic matter effectively in Post-CMP and complete the better effects of cleaning.