Effect of strain on surface diffusion in semiconductor heteroepitaxy
Effect of strain on surface diffusion in semiconductor heteroepitaxy
We present a first-principles analysis of the strain renormalization of the cation diffusivity on the GaAs(001) surface. For the example of In/GaAs(001)-c(4x4) it is shown that the binding of In is increased when the substrate lattice is expanded. The diffusion barrier \Delta E(e) has a non-monotonic strain dependence with a maximum at compressive strain values (e < 0), while being a decreasing function for any tensile strain (e > 0) studied. We discuss the consequences of spatial variations of both the binding energy and the diffusion barrier of an adatom caused by the strain field around a heteroepitaxial island. For a simplified geometry, we evaluate the speed of growth of two coherently strained islands on the GaAs(001) surface and identify a growth regime where island sizes tend to equalize during growth due to the strain dependence of surface diffusion.
Peter Kratzer、Evgeni Penev、Matthias Scheffler
半导体技术晶体学物理学
Peter Kratzer,Evgeni Penev,Matthias Scheffler.Effect of strain on surface diffusion in semiconductor heteroepitaxy[EB/OL].(2001-05-21)[2025-08-02].https://arxiv.org/abs/cond-mat/0105397.点此复制
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