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Effect of strain on surface diffusion in semiconductor heteroepitaxy

Effect of strain on surface diffusion in semiconductor heteroepitaxy

来源:Arxiv_logoArxiv
英文摘要

We present a first-principles analysis of the strain renormalization of the cation diffusivity on the GaAs(001) surface. For the example of In/GaAs(001)-c(4x4) it is shown that the binding of In is increased when the substrate lattice is expanded. The diffusion barrier \Delta E(e) has a non-monotonic strain dependence with a maximum at compressive strain values (e < 0), while being a decreasing function for any tensile strain (e > 0) studied. We discuss the consequences of spatial variations of both the binding energy and the diffusion barrier of an adatom caused by the strain field around a heteroepitaxial island. For a simplified geometry, we evaluate the speed of growth of two coherently strained islands on the GaAs(001) surface and identify a growth regime where island sizes tend to equalize during growth due to the strain dependence of surface diffusion.

Peter Kratzer、Evgeni Penev、Matthias Scheffler

10.1103/PhysRevB.64.085401

半导体技术晶体学物理学

Peter Kratzer,Evgeni Penev,Matthias Scheffler.Effect of strain on surface diffusion in semiconductor heteroepitaxy[EB/OL].(2001-05-21)[2025-08-02].https://arxiv.org/abs/cond-mat/0105397.点此复制

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