Irradiation effect of hot electronic beams on parylene films

he multi-layer parylene (PP) films were irradiated by hot electrons with a dose of 2×1016 cm?2. The irradiated and non-irradiated films have been examined by FT IR, UV-Vis and strain-stress measurement instruments. The results show that the damage has been created for irradiated films, including benzene rings and broken C-C bonds. The absorbance on the vision light increases and the Yang’s modulus decreases greatly in irradiated films with the worse toughness. The experimental conditions determine whether these effects hinder hydrodynamic instability or not.