蒸发氧化法制备高透过率ZnO薄膜
ZnO Thin Films of High Transmittion prepared by Evaporation –oxidation Method
本文采用热蒸发法在普通玻璃衬底上蒸镀Zn膜，利用低温氧化法制备出ZnO薄膜，并研究不同的氧化方法对ZnO薄膜的影响。采用X射线衍射（XRD）以及透射光谱研究了不同氧化过程对ZnO薄膜的结构，光学性能的影响。结果发现采用分步氧化法得到的样品质量明显好于直接氧化的样品，获得的样品的最高可见光透过率大于90％。
Zn films have been deposited on common glasses. Then ZnO thin films have been made by low temperature oxidation method. In this paper, the influence of different oxidation methods making ZnO thin films has been investigated. And the influence on structure and optical property has been tested by X-ray diffraction and transmitted spectrum. The results show the quality of ZnO thin films made by step-by-step-oxidation method is much better than direct-oxidation method, and the highest light transmittance of thin films is over 90%.
李雪、杜国同、迟景阳、孙景昌、程轶、赵涧泽、胡礼中、梁红伟
材料科学物理学
ZnO 薄膜蒸发氧化法分步氧化X射线衍射低温氧化
ZnO thin filmsEvaporation–oxidation Methodstep-by-step-oxidation methodX-ray diffractionlow temperature oxidation
李雪,杜国同,迟景阳,孙景昌,程轶,赵涧泽,胡礼中,梁红伟.蒸发氧化法制备高透过率ZnO薄膜[EB/OL].(2009-05-19)[2025-08-02].http://www.paper.edu.cn/releasepaper/content/200905-446.点此复制
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